Silane | Silanes | Alkyl Silanes | Developmental
|
| SiSiB® PC5401
Tetramethylsilane.
Synonym: Tetramethylsilane
|
|
SiSiB® organosilanes basic structure is RnSi(OR)4-n, wherein "R" is an alkyl, aryl, or other organofunctional group and "OR" is a methoxy, ethoxy, or acetoxy group.
|
| Typical Physical Properties |
| Chemical Name: |
Tetramethylsilane |
| CAS No.: |
75-76-3 |
| EINECS No.: |
200-899-1 |
| Empirical Formula: |
C4H12Si |
| Molecular Weight: |
88.22 |
| Boiling Point: |
26.6°C [760mmHg] |
| Flash Point: |
-28°C |
| |
|
| Color and Appearance: |
Colorless clear liquid |
| Density [25°C]: |
0.641 |
| Refractive Index [25°C]: |
1.3588[25°C] |
| Purity: |
98% by GC |
|
SiSiB® PC5401 is used for PECVD of low k dielectric and barrier layers in damascene metallization applications. |
Net weight 120Kg steel drum, for more details, please visit Packing Centre.
|
|
